Pulsed Heating for Plasma Assisted Processes, Principles and Application

摘要

Pulsed heating is an efficient method to condense coatings at temperatures higher than the substrate temperature. Pulsed heating will allow synthesis of high temperature phases. Condensing at higher temperatures will increase the thermal stability of the coatings. The validity of the physical concept has been demonstrated by model experiments. The influence of pulsed heating on coating structure and properties has been demonstrated for sputtered CrC/a-C:H and arc co-evaporated CrC/C coatings.