FABRICATION OF MICRO-MACHINE ELEMENTS BY FIVE-AXIS LASER PROCESSING SYSTEM

摘要

Laser micro-processing system, which consisted of five-axis PC-controlled automatic stage and FHG of Nd:YAG/ Yb doped fiber laser oscillators, was developed. By arrangement of the stages, this system enabled both of milling and lathe processing for various materials. In this study, for example, a microwindmill (outer diameter: 400 μm) of polyimide and a micro-cylindrical cantilever (diameter: 125 μm) of ionexchanged lime-sodium glass were fabricated. The dimension errors of these elements were within five percent of designed diameters. A micro-spring (diameter: 460 μm) of stainless steel was also fabricated by laser lathe method coupled with electrochemical polishing technique.