PATTERNING OF ORGANIC, ELECTRONIC DEVICES USING A HIGH AVERAGE POWER PICOSECOND LASER

摘要

A picosecond pulsed laser has demonstrated successfulrnselective ablation of different thin film layers fromrnmultilayer stacks on flexible substrates allowingrnstructuring of large area flexible organic electronicrndevices. These thin film layers are extremely thin andrnsensitive to thermal damage, so the ultrashort pulsernduration combined with the flexibility to use infrared,rngreen and ultraviolet wavelengths allows cleanrnscribing of a range of thin film materials used inrnorganic, electronic devices. This capability combinedrnwith the high repetition rate allows high scribe speedsrnof several metres/second with little or no surface debrisrnor heat affected zone. Such laser patterning is wellrnsuited for reel-to-reel processes offering thernopportunity for cost effective production of flexiblerndevices.