LASER MICRO-ADJUSTMENT USING ULTRA-SHORT PULSES

摘要

MEMS manufacturing requires accurate positioningrnand high reproducibility. Lasers can be utilised inrnaccurate post-fabrication adjustment, allowing forrnmanufacturing processes with relatively largerntolerances. Laser micro forming (LμF) is a process forrnthe precision adjustment, shaping or correction ofrndistortion in micro-scale metallic components throughrnthe application of laser irradiation without the need forrnpermanent dies or tools. The non-contact nature of thernprocess is also useful in accessing specific microcomponentsrnwithin a device which may be highlyrnsensitive to mechanical force. As such it has potentialrnfor widespread application in both the manufacturingrnand microelectronics industry. Presented in this workrnis a novel technique for thermal LμF involvingrnpicosecond duration pulses. A potential application inrnthe micro-adjustment of MEMS scale components isrnalso presented.