In using beam scanning microscope with scanners as acousto-optic deflectors, there is a 'speed down' in vicinity of maximum deflected angle in spite of linear input as driving voltage, that is, there is some non-uniform scanning velocity on lateral direction. It results from non-linearity in AO scanning. By driving the calculated voltage from a constant angular velocity equation, the scanning range can be expanded. To overcome this DC offset of the image extinction that mainly results from AO diffraction and optical alignment error, the filtering is done about cut off frequency obtained in experiment that is carried out with optical mirror.
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