Recent Advances in Research on Confocal Microscopy with Ultrahigh Axial Resolution and Noise Suppression

摘要

In order to improve the resolving power and noise suppression capability of confocal microscopy, three confocal measurement systems have been briefly introduced and commented, including the improved differential confocal microscopy, superresolution phase-shifting resolving confocal microscopy, and confocal simultaneous phase-shifting interferometry. The axial depth resolution of 1nm can be achieved using any of the three techniques based on different measurement principles, and the noise suppression has been realized in varying degrees. These researches have broadened the application of confocal microscopy in the threedimensional ultra-precision measurement of microstructures.