Advances in the development of optical microsystems at dea-optolab: integrated optical measuring devices and diffractive optical components for industrial applications

摘要

There is an increasing demand fro mthe manufacturing industry for simple, compact and yet high-performance instruments for dimensional gauging, measurement of profiles in 2 and 3 dimensions, measurement of surface properties, radiometry, polarimetry, etc. So far, the achievement of small size and low cost for optical tools has been hindered by (i) the dimensions of the light sources (mainly lasers) used for the applications, and (ii) the dimensions of optical components (lenses, prisms, etc.).