Characterization of multilayered ZrN/CrN coatings deposited by vacuum arc technology

摘要

The structure, elemental and phase compositions of the multilayered ZrN/CrN coatings obtained by the vacuum arc technique are investigated. The coatings are characterized by scanning electron microscopy with energy dispersive spectroscopy, X-ray diffraction and differential scanning calorimetry. A stronger preferred orientation along ZrN (200) plane is observed in all multilayers. EDS spectra confirmed the formation of stoichiometric composition. The DSC curves of multilayer ZrN/CrN coatings annealed at 1400°C exhibit exothermic peaks. Microhardness tests showed that the multilayer coatings have different hardness ranging from 5244 to maximum 8795HV0.025 depending on the variations of bilayer thickness and deposition conditions.