Design of FPGA based scan generator and Image Grabbing System for Scanning Electron Microscope

摘要

This paper describes the preliminary design of FPGA based scan generator and Image Grabber System for Scanning Electron Microscope (SEM). The complete System is built around Xilinx Sparten-6 FPGA. Scanning Electron Microscope uses finely focused beam of high energy electrons for forming the image of the sample. The beam is raster scanned across the sample and the intensity information pertaining to each pixel is detected by suitable detector and sent to personal computer for the formation of image. The electron beam used for scanning the beam is raster scanned with the help of Scan Generator and the image is captured with the help of Image Grabbing unit.