Capacitance force piezoelectric extraction

摘要

The functionality of the piezoelectric materials is being used in many integrated applications due to their electrical-mechanical reciprocity. Here we have demonstrated that piezoelectric film coefficient can be characterized using capacitance force direct relationship. The proposed technique makes such determination by taking the measuring the capacitance of a piezoelectric disk with the application of mechanical force under a set of assumptions in deriving the equations for the d33 coefficient. Both; the classical parallel plate capacitance analysis and piezoelectric material theory are used to calculate the capacitance variation in lead zirconate titanate (PZT) film, enabling piezoelectric coefficient to be determined. The technique fits well sheet characterization avoiding any complicated preparation and uses arbitrary sample geometry. The values of the coefficients obtained experimentally are found to be similar to those that have been determined by more elaborate methods.