CLEO^#x00AE;/Europe — IQEC 2013 durable, superhydrophobic, antireflection and low haze glass surfaces using scalable metal dewetting nanostructuring

摘要

Nanostructures have been fabricated on a glass surface by reactive ion etching through a metallic nano-mask, refer to Figure 1. The metallic nano-mask is formed by dewetting ultrathin metal films (<10nm thickness) subjected to rapid thermal annealing (RTA) [1].