Development and evaluation of high-sensitivity terahertz camera

摘要

Terahertz (THz) imaging technology attracts a lot of attentions for security and biochemical applications because many biochemical molecules have characteristic absorption spectra in the THz frequency region. THz camera, which can take real-time THz images is one of the most important detection devices for the development of THz imaging technology. NEC has developed a THz camera called IRV-T0830 consisting of uncooled microbolometer THz focal plane arrays (THz-FPAs) [1]. Although the operation of real-time imaging system with this camera was demonstrated recently [2], improvement of performance is still required. In this study, we have improved structure of the THz-FPAs to increase the sensitivity in the THz frequency region, and evaluated frequency-dependent sensitivity of the improved THz camera systematically.