Electrical characterization of ALD Al2O3 - HfO2 and PECVD Al2O3 passivation layers for p-type CZ-Silicon PERC solar cells

机译：用于p型CZ-硅PERC太阳能电池的ALD Al2O3-HfO2和PECVD Al2O3钝化层的电学表征

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This work characterizes p-type Silicon surface passivation using a high-k material (Al2O3 or HfO2) combining capacitance voltage (CV) and lifetime measurements.

机译：这项工作使用结合电容电压（CV）和寿命测量的高k材料（Al2O3或HfO2）来表征p型硅表面钝化。

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来源
《2012 38th IEEE Photovoltaic Specialists Conference.》|2012年|p.001077- 001082|共6页
会议地点 Austin TX(US)
作者
Morato A.;
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作者单位

Department of Information Engineering, University of Padova, via Gradenigo 6/B, 35131, Italy;

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会议组织
原文格式 PDF
正文语种 eng
中图分类光电子技术、激光技术;
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入库时间 2022-08-26 13:55:01

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1. Comparative passivation effect of ALD-driven HfO2 and Al2O3 buffer layers on the interface chemistry and electrical characteristics of Dy-based gate dielectrics [J] . Wang Die, He Gang, Hao Lin, Journal of Materials Chemistry, C. materials for optical and electronic devices . 2019,第7期

机译：ALD驱动HFO2和AL2O3缓冲层对基于DY基介质界面化学和电特性的比较钝化作用
2. Plasma nitridation of atomic layer deposition (ALD) Al2O3 by NH3 in plasma-enhanced chemical vapor deposition (PECVD) for silicon solar cell [J] . Cho Young Joon, Cha Hamchorom, Chang Hyo Sik Surface & Coatings Technology . 2016,第Pta2期

机译：硅太阳能电池等离子体增强化学气相沉积（PECVD）中NH3对原子层沉积（ALD）Al2O3的等离子体氮化
3. Large area p-type PERL cells featuring local p(+) BSF formed by laser processing of ALD Al2O3 layers [J] . Cornagliotti E., Uruena A., Hallam B., Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion . 2015,第Null期

机译：大面积p型PERL电池具有通过激光加工ALD Al2O3层形成的局部p（+）BSF
4. Electrical characterization of ALD Al2O3 - HfO2 and PECVD Al2O3 passivation layers for p-type CZ-Silicon PERC solar cells [C] . Morato A. IEEE Photovoltaic Specialists Conference . 2012

机译：ALD Al2O3 - HFO2和PECVD AL2O3 P型CZ-Silicon Perc太阳能电池钝化层的电气表征
5. Increasing the efficiency of solar cells through the use of a silicon carbide passivation layer. [D] . Hernandez, Carlos. 2012

机译：通过使用碳化硅钝化层来提高太阳能电池的效率。
6. Data of ALD Al2O3 rear surface passivation Al2O3 PERC cell performance and cell efficiency loss mechanisms of Al2O3 PERC cell [O] . Haibing Huang, Jun Lv, Yameng Bao, 2017

机译：ALD Al2O3背面钝化Al2O3 PERC电池性能以及Al2O3 PERC电池效率损失机制的数据
7. Simulation of a Charged Al2O3 Film As An Assisting Passivation Layer For a-Si Passivated Contact p-Type Silicon Solar Cells [O] . Tian Pu, Honglie Shen, Quntao Tang 2021

机译：用于A-Si钝化触点P型硅太阳能电池的辅助钝化层的带电Al2O3膜的模拟

Electrical characterization of ALD Al2O3 - HfO2 and PECVD Al2O3 passivation layers for p-type CZ-Silicon PERC solar cells

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