Amplitude enhancement using vibration mode localization with a single micro-mechanically coupled beam-shaped resonator array

摘要

The use of vibration mode localization in arrays of micro-mechanically coupled, nearly identical beam-shaped resonators has been studied for ultrasensitive mass detection and analyte identification. Eigenstate shifts that are 3 to 4 times (compared to single resonator), and orders (compared to resonator array) of magnitude greater than corresponding shifts in resonant frequency for an induced mass perturbation are theoretically analyzed, from the view points of geometrical design of the coupling overhang, cantilever length, as well as number of the identical coupled cantilevers. Furthermore, the shifts in eigenstates are unique to the resonator to which the stiffness or mass perturbation is induced, therefore providing a characteristic “fingerprint” that identifies the particular resonator where the stiffness or mass perturbation is induced.