Axial Resolution of the Laser Affected Voxel of the Ultra．short Pulse Laser Modification inside of the Transparent Media

摘要

The ultra-short pulse laser direct 3D writing inside of the transparent material becomes a commonly accepted tool to achieve the micrometer scale optical devices and Iab-onchips．The disproportionate scale of the laser affected volume (Affected voxel)along the axial direction degrades the precision of the processing．The refraction will not only change the focusing position and elongate the axial scale of the affected voxel．but also cause harmful astigmatism．The shape of the afiected voxel is discussed and experimentally detected to provide the information to establish a practical processing plan．