Piezoelectric thin film platform for ultrasound transducer arrays

摘要

A piezoelectric thin film MEMs technology platform has been developed that enables processing of miniaturized ultrasound transducer arrays with only minimum 2 mask steps. The thin film ultrasound transducer arrays are operating in the frequency range of > 50 kHz up to > 10 MHz. A new class of ultrasound sensors for e.g. proximity sensing and imaging has been developed.