New reference standards and artifacts for nanoscale physical property characterization

摘要

This paper provides an overview of calibration artifacts being developed at the National Institute of Standards and Technology (NIST) that are intended to aid the accurate determination of nanoscale physical properties across a broad range of applications. We focus on three proposed reference standards: an SI traceable spring constant artifact for calibration of atomic force microscope cantilever stiffness in the nominal range between 0.02 N/m and 0.2 N/m, a piezoresistive force sensor for SI calibration of micronewton level contact forces, and a torsional oscillator for the absolute measurement of thin-film magnetic moments on the order of 1 μA m~2.