Non-contact Measurement of Tooth Profile Error of Minute Module Gears - Application of Optical Cutting Method -

摘要

For accuracy measurement of very tiny tooth profiles of minute module gears, the touch probe method widely known becomes inadequate or impossible to be used. Accordingly, a new method employing the optical cutting technique is examined. This non-contact method is expected to have some merit in simplicity and accuracy, and to make measurement on this case feasible. To ensure the ability of this method, a measuring apparatus which equips a CCD camera as an observing device of picture and adopts the bright field observation method with an incident angel of illumination of 45was constructed by way of trial. Measurements about spur gears with 0.2 module show adequate results considered being in accuracy of micrometer level.