A THEORETICAL AND EXPERIMENTAL STUDY OF THE VIBRATORY BEHAVIOR OF A HIGH-PRECISION OPTICAL POSITIONING TABLE

摘要

At the Advanced Photon Source (APS), a state-of-the-artsynchrotron radiation facility at Argonne National Laboratory(ANL), high-precision optical positioning systems are needed toconduct a wide range of experiments utilizing the highbrilliancex-ray beam. The high-precision, multi-dimensionalpositioning capability required for these positioning systemsmay be compromised by vibratory motion. The vibratorydynamics of the complex kinematic joints and components thatcomprise these multibody structures are not easily described bysimple theoretical models. A combined experimental andtheoretical approach has been developed to predict the dynamicproperties of the individual components and joints and of theassembled multibody system. A prototypical optical table hasbeen analyzed as an example case.