A Low-Cost Uncooled Infrared Microbolometer Based on the Aluminum Micro-hot-plate Array in a Standard CMOS Technology

摘要

This paper introduces the implementation of a low-cost 4×5 pixel array uncooled infrared microbolometer together with its integrated readout circuit in a standard 0.5μm CMOS technology and post-CMOS process.Each pixel,which has a size of 80μm×80μm,is a novel structure of aluminum micro-hot-plate (MHP) fabricated by etching the surface sacrificial layer without any additional masking and lithography procedure.The MPH consists of an aluminum thermistor and a thermally isolated micromachined membrane suspended by two arms.The thermal conductance,thermal time constant and thermal capacitance of the MPH are experimentally measured.