Special Shape Glassy Carbon Microelectrode based on Pyrolyzed Parylene C Process

摘要

A novel glassy carbon microelectrode with special shape is designed and fabricated.The micro-rod is covered by parylene C due to its conformal process and then pyrolyzed the parylene C film to form the glassy carbon microelectrode.The shape of micro-rod is with a tip diameter of 10μm after grinding,the change value of the tip diameter at the length of 100μm as small as possible.The orthogonal experiments are performed to optimize the process parameters.The experimental results show that the optimum parameters are with the Heat of 700,the Velocity of 40,the Delay of 140 and the Pull of 250 using the CO2 laser-based micropipette puller.Parylene C is deposited on micro-rod by CVD process.Parylene films are pyrolyzed in a furnace at 900℃ for 1 h under an inert N2 atmosphere,which converts the highly insulating parylene layer into a conductive carbon film.The procedures described here offer a route to fabrication of thin film carbon electrodes with special shape.