Ultraprecision machining of wavy microstructures on roller surfaces by using a slow tool servo

摘要

Diamond turning of roll-to-roll imprinting molds with patterned surface microstructures,such as microgrooves and micropyramid arrays, is a key process for high-precision manufacturing of functional films.As the demand for microstructured films becomes more and more complicated, it becomes necessary to machine wavy microstructures on roll mold surfaces.In this study, a method for machining wavy microgrooves by using a slow tool servo (STS) system was proposed.Microgrooving experiments using a two-axis STS system were conducted on cylindrical metal molds to machine various wavy microgrooves.The microstructured roll mold was then used for ultraviolet resin imprinting, and high transferability was confirmed.