Automated Multiscale Measurement System for Technical Surface Inspection

摘要

Inspection systems with multiple sensor systems offer the opportunity to select the most suitable sensor according to the measurement task. A challenging objective consists of an automatic selection of the relevant sensors and their embedding into an effective measurement chain. In this publication, we present the implementation of an automated multiscale inspection strategy into a system for the inspection of MEMS and micro lens arrays and give an extended outlook on future challenges which have to be solved to adapt such a system to inspect complex technical components.