INTERACTIVE ANALYSIS WITH EBSD

摘要

Most EBSD analyses are made in the form of automatic area mappings. Modern EBSD systems are optimized for high speed collection and offer powerful post processing tools to quantify microstructural features over the entire analysis area. In a number of cases such area analysis is either impossible or not desirable. Examples of this are: 1. Specimens with strong topography that cannot be sectioned or polished; e.g., fracture surfaces or irregular samples such as some crystalline coatings and nanowires. 2. Beam sensitive materials where the crystal structure damages when exposed to an intense electron beam. 3. Specimens where achieving a uniform surface finish is not possible due to the presence of multiple phases with great variation in polishing responses. 4. Specimens where specific details of the microstructure need to be analyzed. 5. Phase identification.