We have demonstrated that high-quality inorganic CsPbBr3perovskite films and high-efficiency planar CsPbBr3solar cells can be fabricated by dual-source vacuum thermal coevaporation of CsBr and PbBr2.The optimal deposition conditions of CsPbBr3films are asubstrate temperature of300°C,evaporation rate ratio of CsBr to PbBr2of0.7:1,and post-annealing temperature of500°Cfor15s.The deposited films are extremely uniform and have large grains.
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