Optics instruments:Rayleigh criteria, resolution in the scale of wavelength.Material detection:Resonance lines of most of elements lie in EUV, soft X-ray and X-ray regions.MLL was designed by CWT.Depth-graded multilayer, thickness 27μm, N=1582.1-D MLL was fabricated, depth 10μm.MLL was characterized at SSRF, 92nm 1-Dfocusing @ 14kev.Reasons for the broadening of the focal line:layer position error & sampling damages,wave-front aberration & vibration of sample stages.
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