Measurement of the surface profile of a curved optical surface with rotation phase-shifting lateral shear cyclic path optical configuration

摘要

We present a new (to our knowledge) technique for introducing phase shifts between the laterally sheared emergent beam components of a cyclic path optical configuration (CPOC). The phase shifts are introduced by applying a small change in the angle of incidence of the incident beam due to the small angular rotation of the CPOC setup. Phase-shifting interferometry has been applied along with this phase-shifting technique for a CPOC with lateral shear to find the surface slope/profile of curved optical surfaces. Results for a spherical optical surface have been discussed. An optical setup for measurement of the surface profile of toroidal beam line mirrors of synchrotron radiation sources is proposed.