Measurement of longitudinal displacement using lateral shearing cyclic path optical configuration setup and phase shifting interferometry

摘要

We present a technique for the measurement of longitudinal displacement using a lateral shearing cyclic path optical configuration (CPOC) setup and phase shifting interferometry. In the technique, a plane mirror mounted on a linear translation stage, placed slightly away from the focal plane of a lens, introduces a longitudinal focal shift to the incident focusing beam. The resulting spherical wavefront emerging from the lens is sheared into two orthogonally polarized beams using the CPOC setup. By applying polarization phase shifting interferometry (PPSI), the longitudinal focal shift of the beam focus is calculated by determining the slope of the optical path difference variation between the sheared beams. Similarly, the additional focal shift introduced due to longitudinal translation of the mirror, by an unknown amount, is determined using PPSI. Half of the difference between the two longitudinal focal shifts measured gives the longitudinal displacement of the mirror. The technique can be used for an extended range of distance measurement. The novelty of the technique is the introduction of CPOC for the distance measurement. The advantages of the technique compared to other related methods are discussed.