System Identification and Profile Planning for High Accuracy Servo System

摘要

In this paper, system identification and the profile planning based on the model of X-Y table are discussed. The system model being identified is divided into low-frequency model and high-frequency model. Low-frequency model based on the physical pattern is identified by time-domain method. High-frequency model based on the vibration pattern is identified by frequency-domain method. The physical limitations on voltage, velocity and acceleration can be derived from the low-frequency model. The poles with system oscillation can be derived from the high-frequency model. Hence, with the limitations obtained from the identified model, an optimal four-order profile is designed. The presented profile with optimal ramp-up time can reduce the excitation at the natural frequency significantly. Experimental results show that the identified model and the designed profile can be applied to the motion control effectively.