首页> 外国专利> OXIDE SEMICONDUCTOR SINGLE CRYSTAL, METHOD FOR MANUFACTURING THE SAME, TRANSPARENT CONDUCTIVE MATERIAL AND TRANSPARENT CONDUCTIVE SUBSTRATE

OXIDE SEMICONDUCTOR SINGLE CRYSTAL, METHOD FOR MANUFACTURING THE SAME, TRANSPARENT CONDUCTIVE MATERIAL AND TRANSPARENT CONDUCTIVE SUBSTRATE

机译:氧化物半导体单晶,制造方法,透明导电材料和透明导电基质

摘要

PROBLEM TO BE SOLVED: To provide: an oxide semiconductor single crystal having a larger size compared with a conventional single crystal having a micron order size and having a high occupancy of 1:1:1:4 phase crystal (InGaZnO4); a method for manufacturing the same; a transparent conductive material; and a transparent conductive substrate.;SOLUTION: The method for manufacturing an oxide semiconductor single crystal includes the step of manufacturing the oxide semiconductor single crystal having a composition represented by (InGaO3)m(ZnO)n (m≥1, n≥1, m, n: an integer) by heating a sample rod including indium, gallium and zinc at a molar ratio represented by In:Ga:Zn=1:1:a (a1) at a pressure of more than 1 atmosphere in an oxygen containing atmosphere by a floating zone method and cooling a melt formed by the heating.;SELECTED DRAWING: Figure 2A;COPYRIGHT: (C)2019,JPO&INPIT
机译:解决的问题:提供一种氧化物半导体单晶,该氧化物半导体单晶与具有微米级尺寸且具有1:1:1:4的高占有率的传统单晶相比具有更大的尺寸(InGaZnO <4> / Sub>);一种制造方法;透明导电材料;解决方案:氧化物半导体单晶的制造方法包括以下步骤:制造具有以(InGaO 3 m表示的成分的氧化物半导体单晶。通过以In:Ga表示的摩尔比加热包含铟,镓和锌的样品棒来使Sub>(ZnO) n (m≥1,n≥1,m,n:整数) Zn = 1:1:a(a> 1)在大于1个大气压的压力下通过浮区法在含氧气氛中冷却并冷却通过加热形成的熔体。图2A;版权:(C )2019,日本特许厅

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号