首页>
外国专利>
OXIDE SEMICONDUCTOR SINGLE CRYSTAL, METHOD FOR MANUFACTURING THE SAME, TRANSPARENT CONDUCTIVE MATERIAL AND TRANSPARENT CONDUCTIVE SUBSTRATE
OXIDE SEMICONDUCTOR SINGLE CRYSTAL, METHOD FOR MANUFACTURING THE SAME, TRANSPARENT CONDUCTIVE MATERIAL AND TRANSPARENT CONDUCTIVE SUBSTRATE
展开▼
机译:氧化物半导体单晶,制造方法,透明导电材料和透明导电基质
展开▼
页面导航
摘要
著录项
相似文献
摘要
PROBLEM TO BE SOLVED: To provide: an oxide semiconductor single crystal having a larger size compared with a conventional single crystal having a micron order size and having a high occupancy of 1:1:1:4 phase crystal (InGaZnO4); a method for manufacturing the same; a transparent conductive material; and a transparent conductive substrate.;SOLUTION: The method for manufacturing an oxide semiconductor single crystal includes the step of manufacturing the oxide semiconductor single crystal having a composition represented by (InGaO3)m(ZnO)n (m≥1, n≥1, m, n: an integer) by heating a sample rod including indium, gallium and zinc at a molar ratio represented by In:Ga:Zn=1:1:a (a1) at a pressure of more than 1 atmosphere in an oxygen containing atmosphere by a floating zone method and cooling a melt formed by the heating.;SELECTED DRAWING: Figure 2A;COPYRIGHT: (C)2019,JPO&INPIT
展开▼