Characterization and air pressure sensing of doubly clamped multi-walled carbon nanotubes

摘要

We report the fabrication and characterization of doubly clamped multi-walled carbon nanotubes (MWNTs). The devices were assembled by applying an electric field while the MWNTs were firmly clamped and suspended at both ends of a thick metal trench electrode in solution. The contacts were further processed using a focused ion beam. Final dimensions ranged from 100 to 150 nm in diameter and 1.5-4 mu m in length. The fabricated devices were characterized by I-V curves, impedance measurements, and their mechanical deformation under a high pressure airflow. In the latter case, the resistance of a MWNT device varied linearly with the magnitude of the air pressure. These characteristics strongly suggest potential applications in fields such as nanoelectronics and sensors.