ELLIPSOMETRY OF LIGHT SCATTERING FROM MULTILAYER COATINGS

摘要

A scatterometer is extended and allows us to perform ellipsometric measurements on scattered light in each direction of space. Experimental data are given for single thin-film layers and optical coatings and reveal unexpected results. The phenomena are investigated by means of the electromagnetic theories of surface and bulk scattering that emphasize the role of partial correlation and localized defects. (C) 1996 Optical Society of America [References: 17]