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Atomic force microscope cantilever calibration using a focused ion beam

机译:使用聚焦离子束的原子力显微镜悬臂标定

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摘要

A calibration method is presented for determining the spring constant of atomic force microscope (AFM) cantilevers, which is a modification of the established Cleveland added mass technique. A focused ion beam (FIB) is used to remove a well-defined volume from a cantilever with known density, substantially reducing the uncertainty usually present in the added mass method. The technique can be applied to any type of AFM cantilever; but for the lowest uncertainty it is best applied to silicon cantilevers with spring constants above 0.7Nm ~1, where uncertainty is demonstrated to be typically between 7 and 10%. Despite the removal of mass from the cantilever, the calibration method presented does not impair the probes ability to acquire data. The technique has been extensively tested in order to verify the underlying assumptions in the method. This method was compared to a number of other calibration methods and practical improvements to some of these techniques were developed, as well as important insights into the behavior of FIB modified cantilevers. These results will prove useful to research groups concerned with the application of microcantilevers to nanoscience, in particular for cases where maintaining pristine AFM tip condition is critical
机译:提出了一种用于确定原子力显微镜(AFM)悬臂弹簧常数的校准方法,该方法是对已建立的克利夫兰附加质量技术的改进。聚焦离子束(FIB)用于从具有已知密度的悬臂梁中去除明确定义的体积,从而大大降低了添加质量方法中通常存在的不确定性。该技术可以应用于任何类型的AFM悬臂。但是对于最低的不确定性,最好将其应用于弹簧常数大于0.7Nm〜1的硅悬臂梁,其不确定性通常在7%至10%之间。尽管从悬臂中去除了质量,但提出的校准方法不会损害探头的数据采集能力。为了验证该方法中的基本假设,已对该技术进行了广泛的测试。将该方法与许多其他校准方法进行了比较,并对其中一些技术进行了实际改进,并对FIB修饰的悬臂的行为有了重要的认识。这些结果将证明对将微悬臂梁应用于纳米科学的研究小组有用,特别是对于维持原始AFM尖端条件至关重要的情况

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