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Absolute spherical surface metrology by differencing rotation maps

机译:通过差分旋转图实现绝对球面计量

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摘要

A simple novel method for the absolute interferometric testing of spherical surfaces is presented. This approach yields an estimate for test surface errors without changing experimental settings, such as cavity length, which may affect the apparent reference errors. The test surface is tested in three orientations: a basic position and two rotation positions. Full-surface absolute maps for each test piece are determined with the proposition that any arbitrary wavefront of a circular cross section may be expressed as a linear combination of polynomial terms and a data-processing technique based on differencing rotation maps of the rotated surface. An optimized numerical reconstruction algorithm employing the least-squares technique to determine the true azimuthal positions of part rotation is used to reconstruct the rotational data. The technique does not require any assumptions about the surfaces under test and additional measurements. The differencing rotation method provides a new approach for rotationally asymmetric removal and azimuthal errors correction in the absolute test. Experimental results are presented to compare the method proposed to the classic two-sphere method. (C) 2015 Optical Society of America
机译:提出了一种用于球面绝对干涉测量的简单新颖方法。这种方法无需改变实验设置(例如腔体长度)即可得出测试表面误差的估计值,而实验设置可能会影响表观参考误差。在三个方向上测试测试表面:一个基本位置和两个旋转位置。确定每个测试件的全表面绝对图的前提是,圆形横截面的任意波阵面都可以表示为多项式项的线性组合,并且可以基于旋转表面的不同旋转图来进行数据处理。使用最小二乘技术确定零件旋转的真实方位角位置的优化数值重建算法可用于重建旋转数据。该技术不需要对被测表面和其他测量进行任何假设。差分旋转法为绝对测试中的旋转非对称去除和方位角误差校正提供了一种新方法。给出实验结果,以比较所提出的方法与经典的两球法。 (C)2015年美国眼镜学会

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