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首页> 外文期刊>Journal of Low Temperature Physics >Prolonged Laser Ablation Effects of YBCO Ceramic Targets During Thin Film Deposition:Influence of Processing Parameters
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Prolonged Laser Ablation Effects of YBCO Ceramic Targets During Thin Film Deposition:Influence of Processing Parameters

机译:YBCO陶瓷靶在薄膜沉积过程中的长期激光烧蚀效应:工艺参数的影响

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摘要

Cumulative laser irradiation during high-Tc superconducting thin film : pulsed laser deposition (PLD) may have a detrimental effect on film characteristics. Initial decrease of deposition rate and gradual shift of the center of the deposited material spot towards the incoming laser ;beam were registered on cold glass substrates. Their absorbqnce was 'used for evaluation of the film thickness distribution over tne substrate tuna- At the initial stage, two components of the spot could be distinguished along its short axis: central (~cos'>6, and peripherial (~cosO), while with cumulative irradiation the thickness followed an overall cost 6 (m
机译:高Tc超导薄膜中的累积激光辐照:脉冲激光沉积(PLD)可能会对薄膜特性产生不利影响。沉积速率的最初降低和沉积材料斑点中心向入射激光的逐渐偏移都记录在冷玻璃基板上。它们的吸收率“用于评估在金枪鱼基底上的膜厚度分布。在初始阶段,沿其短轴可以区分斑点的两个成分:中心点(〜cos'> 6,外围点(〜cosO),在累积辐射的情况下,厚度遵循总成本6(m

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