Development of a GaAs monolithic surface acoustic wave integratedcircuit

摘要

An oscillator technology using surface acoustic wave (SAW) delaynlines integrated with GaAs MESFET electronics has been developed fornGaAs-based integrated microsensor applications. The oscillator consistsnof a two-port SAW delay line in a feedback loop with a four-stage GaAsnMESFET amplifier. Oscillators with frequencies of 470, 350, and 200 MHznhave been designed and fabricated. This oscillator technology is mostnsuitable for sensor applications but can logically be extended tonradio-frequency oscillator and filter applications by methods well knownnfor other piezoelectric substrates