(Electro-) mechanical characteristics of electrostatically drivenvacuum encapsulated polysilicon resonators

摘要

The design, fabrication and performance of vacuum-encapsulatednelectrostatically driven polysilicon resonating beams, 210-510 Μmnlong, 100 Μm wide, and 1.5 Μm thick, are described. The shortestnbeams have a fundamental frequency of 324 kHz, a gauge factor of 2400nand a quality factor of 600 at cavity pressures of 0.15 mbar. Intrinsicnquality factors of 18000 were measured below 0.01 mbar