(Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators

摘要

The design, fabrication and performance of vacuum-encapsulated electrostatically driven polysilicon resonating beams, 210-510 /spl mu/m long, 100 /spl mu/m wide, and 1.5 /spl mu/m thick, are described. The shortest beams have a fundamental frequency of 324 kHz, a gauge factor of 2400 and a quality factor of 600 at cavity pressures of 0.15 mbar. Intrinsic quality factors of 18000 were measured below 0.01 mbar.