Fabrication of Refractive Microlens Array with no Dead Area

摘要

A new type of microlens array, which has continuous relief of parabolic section profile and no dead area in introduced. This type of microlens array has much less chromatic aberration compared to kinoform microlens arrays, and has no dead area problem of other type of refractive microlens arrays. The method called 'moving-mask' to fabricate such microlens arrays is presented, and the experimental results are also giv- en.