MANUFACTURING METHOD OF FORMING MICROLENS AND A MICROLENS ARRAY CAPABLE OF HAVING A DEAD ZONE BY USING A GRAY TONE MASK

摘要

PURPOSE: A manufacturing method of fabricating micro lens and a microlens array are provided to form micro lens by processing an exposure process twice after designing the gray toned mask into 2 steps.;CONSTITUTION: A manufacturing method of fabricating micro lens comprises next steps: forming a lens forming material layer on a semiconductor board; forming first micro lens(400) using a part of the lens forming material layer; and forming second micro lens(402) using the other part of the lens forming material layer. The first and the second gray tone masks are formed into a transmission region and a shut-off region. The transmission region transmits light into the lens forming material layer. The shut-off region blocks light. The shut-off region is made of chrome. A density of the material blocking light in the shut-off region is about 20-80%.;COPYRIGHT KIPO 2012