Initial levitation control for micromachined electrostatically suspended accelerometer without bias voltage

摘要

It is proposed in this paper a suspension control without bias voltage which can be used in the initial levitation of a micromachined electrostatically suspended accelerometer (MESA) to achieve steady control results. The control with bias voltage is commonly used in the initial levitation for the approximate linear model can be constructed near the null position. However, the highly nonlinear nature far away from the null position will inevitably affect the dynamic performance. In order to enhance the dynamic stability, a nonlinear controller is designed using controller without bias voltage. The experimental results demonstrate that, with FLC control, only one electrode is energized in a given time, the overshoot is 12% and the setting time is 16.6ms, which improves the dynamic performance and global stability dramatically.