Fabrication and Characterization of Nano-scaled Cr Schottky Diodes Using AAO Templates

摘要

We fabricated Anodic Aluminum Oxide (AAO) templates with three different heights by controlling 1st and 2nd anodizing times. We obtained nano-scaled Cr Schottky diodes with different diameters (about 75 nm, 55 nm, and 35 nm) using AAO templates. Cr Schottky diodes with smaller diameters yielded higher current densities than those with larger diameters, due to enhanced tunnel current. It is caused by the reduced Schottky barrier thickness, as the diameters of Cr nanodots are much smaller than Debye length (156 nm).