Abstract: Optical parameters of metallic and non-metallic thin films (complex dielectric function and the thickness) can be determined by measurement of the attenuated total reflection (ATR) of light. In this method the first layer should be a surface-plasmon-carrying metal film as e.g. silver or gold, while the 100 - 200 angstrom thick adlayers could be both metallic or non-metallic. The basic unit of our newly developed multichannel reflectometer is a conventional ATR reflectometer, working in the Kretschmann geometry. The light source is a white lamp unit and the analysis of the reflected beam is performed using an OMA-4 multichannel optical analyzer. This instrument makes possible the determination of the angular distribution of reflectance of thin film samples in the 400 - 900 nm wavelength range in one cycle. !6
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