Near-field optical metrology

摘要

Abstract: The relations of Near Field Optics with Metrology are of two kinds. First, it shifts the resolution limit towards the nanometer scale. This improvement is due to a strong interaction between the probe and the sample and its consequence for the quantitative interpretation is a non- linear relation between the image and the object. Secondly, Near Field Optics uses some of the classical detection methods of metrology such as heterodyne interferometry and image processing. !28