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Transmission X-Ray Critical Dimension (T-XCD) Characterization of Shift and Tilt of Stacks of High-Aspect-Ratio (HAR) Structures
Transmission X-Ray Critical Dimension (T-XCD) Characterization of Shift and Tilt of Stacks of High-Aspect-Ratio (HAR) Structures
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机译:传输X射线临界尺寸(T-XCD)的换档和倾斜的高纵横比(HAR)结构的表征
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摘要
A method for X-ray measurement includes generating and directing an X-ray beam to a sample including at least first and second layers stacked on one another, the X-ray beam incident on a sample location at which the first and second layers include respective first and second high aspect ratio (HAR) structures. X-ray scatter profiles are measured, that are emitted from the sample location in response to the X-ray beam as a function of tilt angle between the sample and the X-ray beam. A shift is estimated, between the first and second layers and a characteristic tilt of the first and second layers, based on the X-ray scatter profiles measured as a function of the tilt angle.
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