FAULT ANALYZING SYSTEM AND METHOD FOR ANALYZING FAULT USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a fault analyzing system for specifying a fault position of a semiconductor circuit device based on a layout diagram coincident with a circuit design and a method for analyzing the fault. ;SOLUTION: By using the fault analyzing system comprising an electron beam tester 2 for emitting an electron beam to a semiconductor circuit device to acquire a potential contrast image according to a surface potential, memory means 12 to 16, and a display means 7, circuit design information of the circuit device is previously stored in the means 13 to 15, the beam is emitted to the circuit device by using the tester 2 to acquire the potential contrast image, circuit connecting information on the circuit device to be operated corresponding to respective logic tests is analyzed based on the design information, and a layout diagram displaying an expected shape and the contrast by the images is formed. If an operational fault is confirmed by a test, the layout diagram corresponding to its testing content is collated to the contrast image, and a position in which a mismatch occurs is displayed on a display means 7.;COPYRIGHT: (C)2000,JPO