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Discontinuous dielectric interface for bipolar transistors
Discontinuous dielectric interface for bipolar transistors
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机译:双极晶体管的不连续介电界面
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摘要
A process for forming at least one interface region between two regions of semiconductor material. At least one region of dielectric material comprising nitrogen is formed in the vicinity of at least a portion of a boundary between the two regions of semiconductor material, thereby controlling electrical resistance at the interface.
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