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METAL CHELATING AGENTS USEFUL IN SEPARATING METALS USING SUPERCRITICAL CARBON DIOXIDE, THEIR PREPARATION AND USE
METAL CHELATING AGENTS USEFUL IN SEPARATING METALS USING SUPERCRITICAL CARBON DIOXIDE, THEIR PREPARATION AND USE
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机译:超临界二氧化碳分离金属中常用的金属螯合剂及其制备和使用
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摘要
The present invention is a novel type of thiol chelating agent useful for improving the efficiency of metal extraction using environmentally friendly supercritical carbon dioxide, a method for preparing the same and various materials (eg, solid, liquid, slurry, semiconductor substrate, The present invention relates to a method of improving the efficiency of metal extraction using carbon dioxide from an electronic substrate. Specifically, the compound used as the novel chelating agent is combined with a carbon dioxide affinity organic compound, thereby forming a soluble complex in the supercritical carbon dioxide to enable the removal of metal from various materials. In a preferred embodiment, the chelating agent of the present invention comprises linear and branched fluorine-based thiols and hydrocarbon-based thiols. These new chelating agents provide a simple and easy metal extraction method that increases the solubility in carbon dioxide fluids and enables the extraction of metals in a shorter time than the conventional methods, making it practical for use in various fields such as semiconductor substrates and electronic substrates. It is effective. The method provides an environmentally friendly method without the use of biologically harmful solvents. In addition, supercritical fluids can be regenerated and metals can be recovered to provide an economical and effective process.;Supercritical carbon dioxide, thiol chelating agents, metal extraction, fluorine, organic compounds
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