METAL CHELATING AGENTS USEFUL IN SUPERCRITICAL CARBON DIOXIDE, THEIR PREPARATION AND USES

摘要

The present invention is a novel type of thiol chelating agent useful for improving the efficiency of metal extraction using environmentally friendly supercritical carbon dioxide, a method for preparing the same and various materials (eg, solid, liquid, slurry, semiconductor substrate, The present invention relates to a method of improving the efficiency of metal extraction using carbon dioxide from an electronic substrate. Specifically, the compound used as the novel chelating agent is combined with a carbon dioxide affinity organic compound, thereby forming a soluble complex in the supercritical carbon dioxide to enable the removal of metal from various materials. Chelating agents of the present invention include thiols of linear and branched fluorine and hydrocarbon ester structures. The new chelating agent provides a simple and easy metal extraction method to increase the solubility in carbon dioxide fluid to improve the metal extraction efficiency, it is effective to make it practically used in various fields such as semiconductor substrates, electronic substrates. The method provides an environmentally friendly method without the use of biologically harmful solvents. In addition, supercritical fluids can be regenerated and metals can be recovered to provide an economical and effective process.;Supercritical carbon dioxide, thiol chelating agents, metal extraction, fluorine, organic compounds