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OPTICAL APPARATUS FOR PLASMA, WHICH INCLUDES THE SPATIAL RESOLUTION OF PLASMA EMITTED LIGHT
OPTICAL APPARATUS FOR PLASMA, WHICH INCLUDES THE SPATIAL RESOLUTION OF PLASMA EMITTED LIGHT
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机译:等离子体的光学装置,包括等离子体发射光的空间分辨率
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摘要
PURPOSE: An optical apparatus for plasma is provided to measure the spatial distribution of plasma emitted light by regulating the distance between a light receiving lens and a pin-hole.;CONSTITUTION: A light receiving lens(110) receives optical emission spectrum from plasma. A first aperture is arranged between the light receiving lens and the plasma to block out-focused light. A second aperture is arranged between the light receiving lens and the phase forming region of the light receiving lens to block in-focused light. A pin-hole is arranged in the phase forming region of the light receiving lens to limit the depth of focus with respect to a target region.;COPYRIGHT KIPO 2010
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